An ever growing variety of microscale and nanoscale building blocks with unique functionality, such as semiconductor nanowires, metal nanorods, carbon nanotubes, and semiconductor quantum dots, is becoming available. They promise new and disruptive applications in nanoelectronic, optical, and sensing devices. As existing top-down methods cannot cope with the complexity and heterogeneity of the nanoscale building blocks, new and massively parallel heterogeneous integration techniques need to be developed to exploit those materials in large scale. We investigate combinations of nanopatterning and templated assembly to achieve high-yield heterogeneous integration with single particle control. We use capillary forces of a moving meniscus to direct objects into desired positions on a topographically patterned template. Capillary forces are strong and very sensitive regarding the trap geometry. Thus, high-yield and highly specific positioning of small colloidal objects is possible, even with control of the orientation when shape-anisotropic particles, such as nanorods, are used