XRD
X-ray diffractometer
XRD 3000 PTS
The XRD 3000 PTS diffractometer, provided by Seifert (now GE Inspection Technologies GmbH), is a computer controlled diffractometer consisting of a 4-axes 2-circle diffractomer goniometer in a reflective geometry. Anodes used are Cr- and Cu-tubes with either fine point or line focus. The specimen holder is fabricated according to specimen type (for thin/thick films on substrates, large samples, powder samples). The Z-axis of the sample stage can be adjusted with a micrometer. This is of particular interest in the context of grazing incidence and reflectivity measurements. Possible coupled or independent axes movements ( 2theta, W (omega) , C (Chi) and F (Phi)) are: 2theta : -3 to 164 °, W: -4 to 180°, C : -90 to 90 ° and F with unlimited rotation and adjustable rotation speeds. A flat graphite monochromator, variable slits and soller systems are available to impove the quality of patterns measured. The NaI(Tl) scintilation detector is piloted by the 2 theta–arm.
Standard measurements available:
- Qualitative phase analysis via a Bragg-Brentano theta–2theta scan and a grazing incidence 2theta scan (thin film measurement), measurement of lattice parameters.
- Stress measurements of powder and thin films with theta–2theta or 2theta scan at variable C< and/or F positions.
- Texture measurements for bulk and thin films samples by accumulating pole figures of a given Bragg reflection at a larger number of different angular orientations of the sample. This is possible by the coupled or independent movement of the axes (W, C and F).
- Measurment of Rocking curves ( Rocking W and/or C) at a fixed 2theta position.
The measurement and data evaluation are controlled by Rayflex software version 2.336 provided by General Electric. It is supported with PDF (approximately 157,000 experimental and calculated powder patterns) and stress databases.
At our institute the XRD 3000 PTS is used to carry out qualitative phase analysis of thin films (single / multilayer/ gradient) of grazing incidence diffraction and in order to evaluate residual stresses as well as texture measurements on thin films such as AZO, ITO, B-doped diamond, diamond / carbide composite, gradient composite films.